TIA summer festival 2016
  • SUMMER LECTURE in 2016 for Nanotechnology / Nanosciences
  • MNOIC実習講座
  • 第5回 TIAパワーエレクトロニクス・サマースクール
  • 第4回 TIAナノグリーン・サマースクール
  • 第4回 ナノエレクトロニクス・サマースクール
  • 高エネルギー加速器セミナー OHO‘16

SUMMER LECTURE in 2016 for Nanotechnology / Nanosciences

SUMMER LECTURE in 2016 for Nanotechnology / Nanosciences


Application guidebook  

This program is supported by the Ministry of Education, Culture, Sports, Science and Technology as “the construction project for the consortium of the fostering of science and technology personnel”, you will receive privileges as follows:

期 間
2016年7月28日(木)- 8月5日(金) *7月31日(日)を除く
2016年8月29(月)- 9月9日(金) *9月3日(土), 4日(日)を除く
July 28 Thur. – August 5 Fri.(8days:No lecture on July 31 Sun.)
August 29 Mon. – September 9 Fri.(10days:No lecture on Sep. 3 Sat. and 4 Sun.)
会 場

7/28 – 8/5
 筑波大学 総合研究棟B0110、大阪大学吹田キャンパス・豊中キャンパス
8/29 – 9/9 筑波大学 総合研究棟B0611
Laboratory of Advanced Research B, University of Tsukuba
Institute for NanoScience Design, Osaka University (TV Realy)
内 容
Content of Lecture
lecture syllabus
7/28 – 8/5
* Prof. Etienne Gheeraert (Institut Neel, CNRS and University of Grenoble-Alpes, France) “Solid state diffusion”
Solid State Diffusion v2Analysis of scientific workBaSi2 diffusion JJAP2014Cu diffusion barrier on Si APL2008Diamond Vacancy Diffusion DRM2012
Publication Assignment 2SiO2 SiC BTI DFT H diffusion APEXTe diffusion in CdTe SolarCells2014Vacancy Diffusion Graphene NanoSi self-diffusion PRB2013Homework

* Prof. Henri Mariette (Institut Neel, CNRS and University of Grenoble-Alpes, France) “Elaboration of semiconductor nanostructures”
chapter 1chapter 2chapter 3 and 4chapter 5
chapter 6Reading1_Hanon et al. NatureReading2_Kodamabaka et al.ScienceReading3_Paek et al PSSReading4_Rudolph et al.NanolettersReading5_Rueda-Fonseca et al.Nanoletters

* Prof. Ulrike Woggon(Technical University of Berlin, Germany)“Optical spectroscopy of nanostructured materials”
☆Web site for Lecture note

* Dr. Tristan Cren (CNRS/Institut des NanoSciences de Paris, Université Pierre et Marie Curie, France) “STM and STS, their principles and application to materials science”
☆Web site for Lecture note

8/29 – 9/9
* Prof. Christophe Vallée (LTM- CEA/LETI MINATEC and University of Grenoble-Alpes, France) “Thin films and advanced plasma processes for microelectronics”
Lecture file_1 Lecture file_2 Lecture file_3 Lecture file_4 Lecture file_5 Lecture file_6 Lecture file_7
★Advantages and reactors for plasma ALD:
1_Choi 2_Detavernier 3_HBProfijt 4_Kim 5_Lim 6_Park 7_PEALDsystem 8_PlasmaALD
★Atomic Layer Etching
1_Agarwal 2_ALE_ECS-60 3_ALE_ECS-53 4_ALE_Orlein 5_Kanarik
★Double and quaduple patterning
1_Building_On_SDDP_Processes 2_Dhuey_nanotechnology2013 3_Donnelly_reviewplasmaetching 4_HBProfijt_review_Plasma_assisted 5_Mackus_nanoscale2014 6_TEL_slides
★Loading effect (ARDE) in plasma etching
1_Batses_ARDE_JVSTA2014 2_Donnelly_JVSTA2013 3_Hwang_ARDIE_APL97 4_Jensen_ME1995 5_Lai_ARDE_JVSTA2006
★Reacter wall effect on plasma etching
1_Agarwal_JVSTA2008 2_Dictus_JVSTB2010 3_Ino_cleanin_IEEE96g 4_Klimecky_CL2plasma_JVST2003g 5_Session1-2 pesm2014-chanson-final 6_Ullal_Cl2plasma_JVSTA2002
★Selective Deposition by ALD
1_Dong_3Dselective ALD 2_Fang_area selective ALD 3_Farm_thesis_2011 4_Hashemi_selective ALD patterning 5_Moshe_chapteronSelective ALD with SAM 6_Park_TiO2byselective ALD 7_Parsons_selective ALD_Ru 8_Parsons_talk ALD2015_Slides 9_ShawnMiller_TeleConf_6-17-10 10_Zhang_effect of susbtrateon
★Temporal to Spatial ALD
1_Creyghton_plasmaspatial ALD 2_Dickey_lotustechnology 3_Illiberi_SALD 4_Loewenhardt_semicon2015_slides 5_Poodt_reviewoneuropa2013_slides 6_Roozeboom_semiconeuropa2013_slides

Graduate students, young researchers and professionals interested in Nanoscience and Nanotechnology.
Number of Positions
Around 30 people in each class (all-day attendance in principle)
Registration form screening: Graduate students have priority to apply in case of oversubscription. Note: After the closing date for application, an email of participation confirmation will be sent to applicants.
Tuition Fee
※7/28 – 8/5 は 交流会参加費1000円
8/29 – 9/9 は 交流会はありません
Note: 7/28-8/5 Welcome Party (July 28) Fee of 1,000 yen.
8/29-9/9 No party will be held.
Travel Expenses
This Program subsidizes part of the travel and accommodation expenses for
Acquire the credits
Graduate students can acquire the credits(1 credit each). A procedure
for Exchange Students, click Here.
主 催
7/28 – 8/5
筑波大学大学院数理物質科学研究科 大阪大学ナノサイエンスデザイン教育研究センター
8/29 – 9/9
7/28-8/5  Graduate School of Pure and Applied Sciences, University of Tsukuba and stitute for NanoScience Design, Osaka University
8/29-9/9 Graduate School of Pure and Applied Sciences, University of Tsukuba
Application deadline
締切:2016年6月27日(月) ※募集は締め切りました。ご応募ありがとうございました。
June 27 Mon. 2016
Note: We have closed the list. Thank you for your application.
筑波大学 TIA推進室 E-mail:tia-edu★un.tsukuba.ac.jp
TIA Promotion Office, University of Tsukuba
E-mail: tia-edu★un.tsukuba.ac.jp (Note: Change ★ to @)
カテゴリー: summer_fes2016, サマー・オープン・フェスティバル   パーマリンク


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